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231108|2022 xxu s a eng d |
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|a 10.1134/S1024856022050128
|2 doi
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|a koha001009331
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|a RU-ToGU
|b rus
|c RU-ToGU
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|a Improving the stability of the optical system of a laser source based on a position-sensitive detector
|c H. Li, M. V. Andreev, Yu. N. Panchenko, A. V. Puchikin
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|a Текст
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|a электронный
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|a Библиогр.: 12 назв.
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|a Results of numerical and experimental studies on monitoring and control for optical elements of an electric discharge KrF laser by the method of density-based spatial clustering of applications with noises (DBSCAN) are presented. Different methods of processing digital signals obtained using a position-sensitive detector controlling the position of the optical axis of the laser system are considered. A numerical model of optical system stability is developed based on the DBSCAN method with an additional inclusion of digital signal processing with the use of the cumulative moving average. A technique for correction of controlled mirrors with an accuracy of 60 ± 10 μrad for their return to normal position is proposed and implemented; the alignment time does not exceed 5 min.
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|a KrF-лазеры
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| 653 |
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|a автоматизация юстировки
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|a оптические системы
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|a статьи в журналах
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|a Li, Hongda
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|a Andreev, M. V.
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|a Panchenko, Yu. N.
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|a Puchikin, A. V.
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| 773 |
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|t Atmospheric and oceanic optics
|d 2022
|g Vol. 35, № 5. P. 615-619
|x 1024-8560
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|a RU-ToGU
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| 856 |
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|u http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:001009331
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|a статья
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|c 1009331
|d 1009331
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