APA (7th ed.) Citation

Zuza, D. A., Nekhoroshev, V. O., Batrakov, A. V., Markov, A. B., & Kurzina, I. A. Characterization of hexamethyldisiloxane plasma polymerization in a DC glow discharge in an argon flow. Vacuum, 2023, .

Chicago Style (17th ed.) Citation

Zuza, Daniil A., Vitaly O. Nekhoroshev, Alexander V. Batrakov, Alexey B. Markov, and Irina A. Kurzina. "Characterization of Hexamethyldisiloxane Plasma Polymerization in a DC Glow Discharge in an Argon Flow." Vacuum 2023 ().

MLA (8th ed.) Citation

Zuza, Daniil A., et al. "Characterization of Hexamethyldisiloxane Plasma Polymerization in a DC Glow Discharge in an Argon Flow." Vacuum, 2023, .