Characterization of hexamethyldisiloxane plasma polymerization in a DC glow discharge in an argon flow
This work aims to study hexamethyldisiloxane (HMDSO) plasma polymerization in a low-pressure glow discharge in a gas flow. HMDSO was activated in a plasma-chemical reactor with a DC glow discharge in an argon flow. The argon flow (the mass flow rate was 230 mg/min) was injected in the direction of t...
| Published in: | Vacuum Vol. 207. P. 111690 (1-10) |
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| Other Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:001009436 |