ITO thin films for low-resistance gas sensors

ITO thin films for low-resistance gas sensors

Indium tin oxide thin films were deposited by magnetron sputtering on ceramic aluminum nitride substrates and were annealed at temperatures of 500 °C and 600 °C. The structural, optical, electrically conductive and gas-sensitive properties of indium tin oxide thin films were studied. The possibility...

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Bibliographic Details
Published in:Materials Vol. 16, № 1. P. 342 (1-16)
Other Authors: Almaev, Aleksei V., Kopyev, Viktor V., Novikov, Vadim A., Chikiryaka, Andrei V., Yakovlev, Nikita N., Usseinov, Abay B., Karipbayev, Zhakyp T., Akilbekov, Abdirash T., Koishybayeva, Zhanymgul K., Popov, Anatoli I.
Format: Article
Language:English
Subjects:
тонкие пленки
оксид индия и олова
газочувствительные свойства
статьи в журналах
Online Access:http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:001132764

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