High sensitivity low-temperature hydrogen sensors based on SnO2/κ(ε)-Ga2O3:Sn heterostructure
The structural and gas-sensitive properties of n-N SnO2/κ(ε)-Ga2O3:Sn heterostructures were investigated in detail for the first time. The κ(ε)-Ga2O3:Sn and SnO2 films were grown by the halide vapor phase epitaxy and the high-frequency magnetron sputtering, respectively. The gas sensor response and...
| Published in: | Chemosensors Vol. 11, № 6. P. 325 (1-15) |
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| Other Authors: | , , , , , , , , , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:001132767 Перейти в каталог НБ ТГУ |
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| 245 | 1 | 0 | |a High sensitivity low-temperature hydrogen sensors based on SnO2/κ(ε)-Ga2O3:Sn heterostructure |c A. V. Almaev, N. N. Yakovlev, V. V. Kopyev [et al.] |
| 336 | |a Текст | ||
| 337 | |a электронный | ||
| 504 | |a Библиогр.: 59 назв. | ||
| 520 | 3 | |a The structural and gas-sensitive properties of n-N SnO2/κ(ε)-Ga2O3:Sn heterostructures were investigated in detail for the first time. The κ(ε)-Ga2O3:Sn and SnO2 films were grown by the halide vapor phase epitaxy and the high-frequency magnetron sputtering, respectively. The gas sensor response and speed of operation of the structures under H2 exposure exceeded the corresponding values of single κ(ε)-Ga2O3:Sn and SnO2 films within the temperature range of 25-175 °C. Meanwhile, the investigated heterostructures demonstrated a low response to CO, NH3, and CH4 gases and a high response to NO2, even at low concentrations of 100 ppm. The current responses of the SnO2/κ(ε)-Ga2O3:Sn structure to 104 ppm of H2 and 100 ppm of NO2 were 30-47 arb. un. and 3.7 arb. un., correspondingly, at a temperature of 125 °C. The increase in the sensitivity of heterostructures at low temperatures is explained by a rise of the electron concentration and a change of a microrelief of the SnO2 film surface when depositing on κ(ε)-Ga2O3:Sn. The SnO2/κ(ε)-Ga2O3:Sn heterostructures, having high gas sensitivity over a wide operating temperature range, can find application in various fields. | |
| 653 | |a магнетронное распыление | ||
| 653 | |a гетероструктуры | ||
| 653 | |a газовые сенсоры | ||
| 655 | 4 | |a статьи в журналах |9 956547 | |
| 700 | 1 | |a Almaev, Aleksei V. |9 407941 | |
| 700 | 1 | |a Yakovlev, Nikita N. |9 802458 | |
| 700 | 1 | |a Kopyev, Viktor V. |9 114994 | |
| 700 | 1 | |a Nikolaev, Vladimir I. |9 802460 | |
| 700 | 1 | |a Butenko, Pavel N. |9 876423 | |
| 700 | 1 | |a Deng, Jinxiang |9 956548 | |
| 700 | 1 | |a Pechnikov, Aleksei I. |9 802462 | |
| 700 | 1 | |a Korusenko, Petr M. |9 854605 | |
| 700 | 1 | |a Koroleva, Aleksandra |9 956549 | |
| 700 | 1 | |a Zhizhin, Evgeniy V. |9 956550 | |
| 773 | 0 | |t Chemosensors |d 2023 |g Vol. 11, № 6. P. 325 (1-15) |x 2227-9040 | |
| 852 | 4 | |a RU-ToGU | |
| 856 | 4 | |u http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:001132767 | |
| 856 | |y Перейти в каталог НБ ТГУ |u https://koha.lib.tsu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=1132767 | ||
| 908 | |a статья | ||
| 999 | |c 1132767 |d 1132767 | ||
| 039 | |b 100 | ||