Газовая чувствительность гексагонального оксида галлия
The structural and gas-sensitive properties of ε(κ)-Ga2O3 films obtained by halide vapor phase epitaxy (HVPE) under the exposure to CO, H2 and NH3 were studied. The temperature and concentration dependences of the response and their analysis were presented. A gas sensitivity mechanism was proposed....
| Published in: | Перспективы развития фундаментальных наук. Т. 1 : сборник научных трудов XX Международной конференции студентов, аспирантов и молодых ученых, 25-28 апреля 2023 г. Т. 1 : Физика. С. 30-32 |
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| Main Author: | |
| Format: | Book Chapter |
| Language: | Russian |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:001147010 |
| Summary: | The structural and gas-sensitive properties of ε(κ)-Ga2O3 films obtained by halide vapor phase epitaxy (HVPE) under the exposure to CO, H2 and NH3 were studied. The temperature and concentration dependences of the response and their analysis were presented. A gas sensitivity mechanism was proposed. |
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| Bibliography: | Библиогр.: 5 назв. |
| ISBN: | 9785438711377 9785438711360 |