Silicon Devices and Process Integration Deep Submicron and Nano-Scale Technologies /
Published in: | Springer eBooks |
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Main Author: | |
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Format: | eBook |
Language: | English |
Published: |
Boston, MA :
Springer US,
2009.
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Subjects: | |
Online Access: | http://dx.doi.org/10.1007/978-0-387-69010-0 Перейти в каталог НБ ТГУ |