APA (7th ed.) Citation

Frühauf, J. (2005). Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures. Springer e-books.

Chicago Style (17th ed.) Citation

Frühauf, Joachim. "Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures." Springer E-books 2005.

MLA (8th ed.) Citation

Frühauf, Joachim. "Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures." Springer E-books, 2005.