APA Цитирование

Frühauf, J. (2005). Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures. Springer e-books.

Chicago-стиль цитирования

Frühauf, Joachim. "Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures." Springer E-books 2005.

MLA-цитирование

Frühauf, Joachim. "Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures." Springer E-books, 2005.