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090507s2005 xx j eng d |
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|a 9783540268765
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|a to000358646
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9 |
|a 201305271317
|y 200905072230
|z Александр Эльверович Гилязов
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| 040 |
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|a Springer
|c Springer
|d RU-ToGU
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| 100 |
1 |
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|a Frühauf, Joachim.
|9 319502
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| 245 |
1 |
0 |
|a Shape and Functional Elements of the Bulk Silicon Microtechnique
|h Электронный ресурс
|b A Manual of Wet-Etched Silicon Structures /
|c by Joachim Frühauf
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| 260 |
|
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|a Berlin, Heidelberg :
|b Springer-Verlag Berlin Heidelberg,
|c 2005.
|9 729705
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| 650 |
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|a Chemical engineering
|9 303336
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| 650 |
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0 |
|a electronics
|9 303071
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| 650 |
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|a Microwaves
|9 294358
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| 650 |
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|a Optical materials
|9 303073
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| 650 |
1 |
4 |
|a chemistry
|9 161768
|
| 650 |
2 |
4 |
|a Ceramics, Glass, Composites, Natural Methods
|9 143948
|
| 650 |
2 |
4 |
|a Electronics and Microelectronics, Instrumentation
|9 303076
|
| 650 |
2 |
4 |
|a Industrial Chemistry/Chemical Engineering
|9 303339
|
| 650 |
2 |
4 |
|a Microwaves, RF and Optical Engineering
|9 294361
|
| 650 |
2 |
4 |
|a Optical and Electronic Materials
|9 303078
|
| 710 |
2 |
|
|a SpringerLink (Online service)
|9 143950
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| 773 |
0 |
|
|t Springer e-books
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| 856 |
4 |
0 |
|u http://dx.doi.org/10.1007/b138230
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| 856 |
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|y Перейти в каталог НБ ТГУ
|u https://koha.lib.tsu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=235204
|
| 950 |
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|a Chemistry and Materials Science (Springer-11644; ZDB-2-CMS)
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|c 235204
|d 235204
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