Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures /

Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures /

Библиографическая информация
Опубликовано в: :	Springer e-books
Главный автор:	Frühauf, Joachim
Соавтор:	SpringerLink (Online service)
Формат:	Электронная книга
Язык:	English
Публикация:	Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005.
Предметы:	Chemical engineering electronics Microwaves Optical materials chemistry Ceramics, Glass, Composites, Natural Methods Electronics and Microelectronics, Instrumentation Industrial Chemistry/Chemical Engineering Microwaves, RF and Optical Engineering Optical and Electronic Materials
Online-ссылка:	http://dx.doi.org/10.1007/b138230 Перейти в каталог НБ ТГУ

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