Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures /
| Published in: | Springer e-books |
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| Format: | eBook |
| Language: | English |
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Berlin, Heidelberg :
Springer-Verlag Berlin Heidelberg,
2005.
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| Online Access: | http://dx.doi.org/10.1007/b138230 Перейти в каталог НБ ТГУ |