Piezoelectric Multilayer Beam Bending Actuators Static and Dynamic Behavior and Aspects of Sensor Integration /
| Published in: | Springer e-books |
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| Format: | eBook |
| Language: | English |
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Berlin, Heidelberg :
Springer-Verlag Berlin Heidelberg,
2007.
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| Series: | Microtechnology and Mems,
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| Subjects: | |
| Online Access: | http://dx.doi.org/10.1007/978-3-540-32642-7 Перейти в каталог НБ ТГУ |