The application of an assisting gas plasma generator for low-temperature magnetron sputtering of Ti-C-Mo-S antifriction coatings on titanium alloys
| Published in: | Journal of Physics: Conference Series Vol. 652. P. 012058 (1-6) |
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| Corporate Author: | |
| Other Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000517564 Перейти в каталог НБ ТГУ |