Effect of bias voltage on coating homogeneity in plasma immersion ion implantation
The paper presents research results demonstrating the influence of bias on the homogeneity of plasma immersion ion implantation. The research results allow the conclusion that plasma immersion ion implantation can be used to advantage for surface modification of medical materials, e.g., nickel-titan...
| Published in: | AIP Conference Proceedings Vol. 1783. P. 020209-1-020209-4 |
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| Main Author: | |
| Other Authors: | , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000623872 Перейти в каталог НБ ТГУ |