Ammonia sensors based on resistive structures M-SnO2:Sb-M
The paper presents a comparison of the responses of sensors to ammonia in continuous heating and thermal cycling modes, and also shows the dependence of the response time of the sensors on the content NH3. Thin films of tin dioxide were obtained using RF magnetron sputtering, and then annealed in a...
| Published in: | Journal of Physics: Conference Series Vol. 1499. P. 012037 (1-4) |
|---|---|
| Other Authors: | , , , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000791769 Перейти в каталог НБ ТГУ |
| Summary: | The paper presents a comparison of the responses of sensors to ammonia in continuous heating and thermal cycling modes, and also shows the dependence of the response time of the sensors on the content NH3. Thin films of tin dioxide were obtained using RF magnetron sputtering, and then annealed in air at a temperature of 425°C for 24 hours. In thermal cycling, the temperature of the heating cycle remains constant 400 °C (duration of the heating cycle was 8 s). The temperature of the cooling cycle changes in the range 200 °C - 100 °C, but duration of cooling of the cooling cycle was remained constant of 5 s. It was shown that the thermal cycling mode has several advantages over the constant heating mode. The experiments showed that sensors based on SnO2:Sb have short response times - less than 3 seconds. |
|---|---|
| Bibliography: | Библиогр.: 12 назв. |
| ISSN: | 1742-6588 |