Ammonia sensors based on resistive structures M-SnO2:Sb-M
The paper presents a comparison of the responses of sensors to ammonia in continuous heating and thermal cycling modes, and also shows the dependence of the response time of the sensors on the content NH3. Thin films of tin dioxide were obtained using RF magnetron sputtering, and then annealed in a...
| Published in: | Journal of Physics: Conference Series Vol. 1499. P. 012037 (1-4) |
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| Other Authors: | , , , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000791769 Перейти в каталог НБ ТГУ |