Особенности кристаллизации покрытия при отжиге трехслойного ламината Ti-Ni-Ti на воздухе
The gradient coating synthesized on a TiNi substrate by magnetron sputtering a three-layer Ti-Ni-Ti laminate and annealing in air at 950 °C was studied by XRD, SEM, TEM, and AFM methods. The thickness of the sputtered layers was chosen equal to 0.5-1 ym to study the composition and structure of the...
| Published in: | Перспективы развития фундаментальных наук. Т. 1 : сборник научных трудов XVII Международной конференции студентов, аспирантов и молодых ученых, Россия, Томск, 21-24 апреля 2020 г. Т. 1 : Физика. С. 73-75 |
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| Main Author: | |
| Other Authors: | , |
| Format: | Book Chapter |
| Language: | Russian |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:000563837 |
| Summary: | The gradient coating synthesized on a TiNi substrate by magnetron sputtering a three-layer Ti-Ni-Ti laminate and annealing in air at 950 °C was studied by XRD, SEM, TEM, and AFM methods. The thickness of the sputtered layers was chosen equal to 0.5-1 ym to study the composition and structure of the crystalline phases of the gradient coating. This thickness was sufficient for SEM and TEM studies and admissible large for XRD studies of phase composition. SEM and TEM techniques were used to determine the depth and patterns of grains occurrence of titanium carbonitrides. TEM and XRD techniques revealed that reactive synthesis of the coating is followed by transformation of the external amorphous layer of deposited titanium into heterogeneous crystalline titanium oxides. Crystallization of the oxide phase causes an increase in the volume of the external layer and intergranular cracking of the surface. AFM method showed an island microrelief of the external titanium layer formed during synthesis. |
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| Bibliography: | Библиогр.: 4 назв. |
| ISBN: | 9785868898655 9785868898648 |