Effect of the content of silicon on the optical properties of Al-Si-N coatings irradiated with carbon ions in the short-pulse implantation mode
| Published in: | Journal of surface investigation: X-ray, synchrotron and neutron techniques Vol. 16, № 5. P. 702-711 |
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| Other Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:000998292 Перейти в каталог НБ ТГУ |