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21by Борисов, А. А. Алексей АлександровичSubjects: “...имплантация...”
Published 2005
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25Published in Surface and coatings technologySubjects: “...ионная имплантация...”
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26Published in Infrared physics and technologySubjects: “...имплантация ионов мышьяка...”
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27Published in Nuclear instruments and methods in physics research. Section B : Beam interactions with materials and atomsSubjects: “...ионная имплантация...”
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28Published in Journal of Physics: Conference SeriesSubjects: “...ионная имплантация...”
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29Published in Journal of Physics: Conference SeriesSubjects: “...ионная имплантация...”
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32Published in Surface and coatings technologySubjects: “...ионная имплантация...”
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33Published in Journal of electronic materialsSubjects: “...имплантация мышьяка...”
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36Published in AIP Conference ProceedingsSubjects: “...плазменно-иммерсионная имплантация ионов...”
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38Published in Surface and coatings technologySubjects: “...ионная имплантация...”
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