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5Published in Springer eBooks (2015)Table of Contents: “... of the Electromagnetic Response of Metamaterials -- Micromachined Tunable Metamaterials....”
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6Table of Contents: “... Fabrication Process -- Sealing of Surface Micromachined Poly-SiGe Cavities -- Characterization of Poly-SiGe...”
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8Published in Springer eBooks (2015)Table of Contents: “... Micromachining and its Applications -- Chapter 11. Laser Induced Micro-machining and Preliminary Experiments...”
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9Published in Springer eBooks (2014)Table of Contents: “... recording -- In-cell recording and stimulation by engulfment mechanisms.-Micromachining Techniques...”
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10Published 2022Table of Contents: “... for improving the material performance ; Chapter 2. Electrochemical micromachining performance optimization...”
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12Published in Springer eBooks (2015)Table of Contents: “... reactions -- Photolithography -- Silicon micromachining -- Laser based micromachining -- LIGA -- Soft...”
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13Published in Springer eBooks (2015)Table of Contents: “.... Micromachining from a Materials Perspective -- 5. Machining of Brittle Materials Using Nanostructured Diamond...”
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14Published in Springer eBooks (2014)Table of Contents: “... of micromachining -- Micromilling -- Digital image processing in machining -- Formability and simulative tests...”
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15Published in Springer eBooks (2012)Table of Contents: “... Sensor System -- A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry -- MEMS...”
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17Published in Springer eBooks (2014)Table of Contents: “...-mechanical Coupling on Structural Modal Parameters -- Extraction of Modal Parameters of Micromachined...”
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19Published in Springer eBooks (2015)Table of Contents: “... Waveguide -- Femtosecond Lase Micromachining of a-Si:H -- Low-level Monoclinic Content Detection in Zirconia...”
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20Published in Springer eBooks (2014)Table of Contents: “... -- Finishing of Micro-Channels using Abrasive Flow Machining -- An Ultrasonic Micromachining Setup...”
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