Improving the stability of the optical system of a laser source based on a position-sensitive detector
Results of numerical and experimental studies on monitoring and control for optical elements of an electric discharge KrF laser by the method of density-based spatial clustering of applications with noises (DBSCAN) are presented. Different methods of processing digital signals obtained using a posit...
| Опубликовано в: : | Atmospheric and oceanic optics Vol. 35, № 5. P. 615-619 |
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| Другие авторы: | , , , |
| Формат: | Статья в журнале |
| Язык: | English |
| Предметы: | |
| Online-ссылка: | http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:001009331 |
| Итог: | Results of numerical and experimental studies on monitoring and control for optical elements of an electric discharge KrF laser by the method of density-based spatial clustering of applications with noises (DBSCAN) are presented. Different methods of processing digital signals obtained using a position-sensitive detector controlling the position of the optical axis of the laser system are considered. A numerical model of optical system stability is developed based on the DBSCAN method with an additional inclusion of digital signal processing with the use of the cumulative moving average. A technique for correction of controlled mirrors with an accuracy of 60 ± 10 μrad for their return to normal position is proposed and implemented; the alignment time does not exceed 5 min. |
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| Библиография: | Библиогр.: 12 назв. |
| ISSN: | 1024-8560 |