Improving the stability of the optical system of a laser source based on a position-sensitive detector
Results of numerical and experimental studies on monitoring and control for optical elements of an electric discharge KrF laser by the method of density-based spatial clustering of applications with noises (DBSCAN) are presented. Different methods of processing digital signals obtained using a posit...
| Published in: | Atmospheric and oceanic optics Vol. 35, № 5. P. 615-619 |
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| Other Authors: | , , , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:001009331 Перейти в каталог НБ ТГУ |
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| 005 | 20231113162518.0 | ||
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| 008 | 231108|2022 xxu s a eng d | ||
| 024 | 7 | |a 10.1134/S1024856022050128 |2 doi | |
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| 040 | |a RU-ToGU |b rus |c RU-ToGU | ||
| 245 | 1 | 0 | |a Improving the stability of the optical system of a laser source based on a position-sensitive detector |c H. Li, M. V. Andreev, Yu. N. Panchenko, A. V. Puchikin |
| 336 | |a Текст | ||
| 337 | |a электронный | ||
| 504 | |a Библиогр.: 12 назв. | ||
| 520 | 3 | |a Results of numerical and experimental studies on monitoring and control for optical elements of an electric discharge KrF laser by the method of density-based spatial clustering of applications with noises (DBSCAN) are presented. Different methods of processing digital signals obtained using a position-sensitive detector controlling the position of the optical axis of the laser system are considered. A numerical model of optical system stability is developed based on the DBSCAN method with an additional inclusion of digital signal processing with the use of the cumulative moving average. A technique for correction of controlled mirrors with an accuracy of 60 ± 10 μrad for their return to normal position is proposed and implemented; the alignment time does not exceed 5 min. | |
| 653 | |a KrF-лазеры | ||
| 653 | |a автоматизация юстировки | ||
| 653 | |a оптические системы | ||
| 655 | 4 | |a статьи в журналах |9 898721 | |
| 700 | 1 | |a Li, Hongda |9 508828 | |
| 700 | 1 | |a Andreev, M. V. |9 898722 | |
| 700 | 1 | |a Panchenko, Yu. N. | |
| 700 | 1 | |a Puchikin, A. V. |9 853489 | |
| 773 | 0 | |t Atmospheric and oceanic optics |d 2022 |g Vol. 35, № 5. P. 615-619 |x 1024-8560 | |
| 852 | 4 | |a RU-ToGU | |
| 856 | 4 | |u http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:001009331 | |
| 856 | |y Перейти в каталог НБ ТГУ |u https://koha.lib.tsu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=1009331 | ||
| 908 | |a статья | ||
| 999 | |c 1009331 |d 1009331 | ||
| 039 | |b 100 | ||