Investigation of the bimodal character of RHEED intensity oscillations during homoepitaxial growth of Si/Si(100)
This paper presents a study of the bimodal character of the intensity oscillations of diffraction patterns obtained by the method of fast reflected electron diffraction during the epitaxial growth of Si on a Si(100) substrate. The dependence of the nature of oscillations of the intensity of diffract...
| Published in: | Двадцатая Всероссийская конференция студенческих научно-исследовательских инкубаторов, г. Томск, 2-5 мая 2023 г. С. 162-163 |
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| Format: | Book Chapter |
| Language: | English |
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| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:001146789 Перейти в каталог НБ ТГУ |
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| 100 | 1 | |a Sokolov, А. S. |9 975536 | |
| 245 | 1 | 0 | |a Investigation of the bimodal character of RHEED intensity oscillations during homoepitaxial growth of Si/Si(100) |c А. S. Sokolov, O. I. Kukenov |
| 336 | |a Текст | ||
| 337 | |a электронный | ||
| 504 | |a Библиогр.: 3 назв. | ||
| 520 | 3 | |a This paper presents a study of the bimodal character of the intensity oscillations of diffraction patterns obtained by the method of fast reflected electron diffraction during the epitaxial growth of Si on a Si(100) substrate. The dependence of the nature of oscillations of the intensity of diffraction patterns during the epitaxial growth of Si on Si(100) is shown in a wide temperature range of the substrate. | |
| 653 | |a молекулярно-лучевая эпитаксия | ||
| 653 | |a высокоскоростная дифракция отраженных электронов | ||
| 653 | |a кремний | ||
| 653 | |a бимодальность | ||
| 655 | 4 | |a статьи в сборниках |9 975537 | |
| 700 | 1 | |a Kukenov, Olzhas I. |9 899610 | |
| 773 | 0 | |t Двадцатая Всероссийская конференция студенческих научно-исследовательских инкубаторов, г. Томск, 2-5 мая 2023 г. |d Томск, 2023 |g С. 162-163 |z 9785936296987 | |
| 852 | 4 | |a RU-ToGU | |
| 856 | 4 | |u http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:001146789 | |
| 856 | |y Перейти в каталог НБ ТГУ |u https://koha.lib.tsu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=1146789 | ||
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