Modification of the microstructure of TiN-based columnar coatings in indentation zones

The columnar structure of titanium nitride-based coatings deposited by magnetron sputtering is studied. The structure-phase state of the coatings is analyzed after deposition and in the indentation zone. The type of dislocation structure, the grain size, the subgrain size, the misorientations at bou...

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Bibliographic Details
Published in:Russian metallurgy (Metally) № 4. P. 278-284
Main Author: Ovchinnikov, Stanislav V.
Other Authors: Korotaev, Alexander D. 1934-, Pinzhin, Yury P.
Format: Article
Language:English
Subjects:
Online Access:http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000548666
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