Modification of the microstructure of TiN-based columnar coatings in indentation zones
The columnar structure of titanium nitride-based coatings deposited by magnetron sputtering is studied. The structure-phase state of the coatings is analyzed after deposition and in the indentation zone. The type of dislocation structure, the grain size, the subgrain size, the misorientations at bou...
Published in: | Russian metallurgy (Metally) № 4. P. 278-284 |
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Main Author: | |
Other Authors: | , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000548666 Перейти в каталог НБ ТГУ |