Photomodulated Optical Reflectance A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon /
One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it su...
| Published in: | Springer eBooks |
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| Format: | eBook |
| Language: | English |
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Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2012.
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| Series: | Springer Theses, Recognizing Outstanding Ph.D. Research,
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| Subjects: | |
| Online Access: | http://dx.doi.org/10.1007/978-3-642-30108-7 Перейти в каталог НБ ТГУ |