Oxygen incorporation into GST phase-change memory matrix

Oxygen incorporation into GST phase-change memory matrix

Structural changes in amorphous and crystallized GST-225 films induced by the reaction with oxygen are studied at different depth scales. The mechanism of interaction of the very top surface layers with oxygen is studied with low-energy ion scattering (LEIS) technique, while the modifications of che...

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Bibliographic Details
Published in:Applied surface science Vol. 332. P. 533-541
Corporate Author: Томский государственный университет Химический факультет Кафедра неорганической химии
Other Authors: Golovchak, R., Kozyukhin, Sergey A., Chigirinsky, Yu, Kovalskiy, A., Xiong-Skiba, P., Trimble, J., Pafchek, R., Jain, H., Choi, Y. G.
Format: Article
Language:English
Subjects:
рамановская спектроскопия
рассеяние ионов малой энергии
халькогенидное стекло
статьи в журналах
Online Access:http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000526698
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