Temperature Measurement during Millisecond Annealing Ripple Pyrometry for Flash Lamp Annealers /
Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal an...
| Published in: | Springer eBooks |
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| Format: | eBook |
| Language: | English |
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Wiesbaden :
Springer Fachmedien Wiesbaden : Imprint: Springer,
2015.
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| Edition: | 1st ed. 2015. |
| Series: | MatWerk
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| Online Access: | http://dx.doi.org/10.1007/978-3-658-11388-9 Перейти в каталог НБ ТГУ |