Generation of low-temperature plasma by low-pressure arcs for synthesis of nitride coatings
Experiments were performed to study gas, metal, and mixed metal-gas plasmas. The plasmas were generated with the use of an arc evaporator and a gas-plasma source with a hot filament and hollow cathode that were operated independently or simultaneously. It has been revealed that the arc current of ga...
| Published in: | Journal of Physics: Conference Series Vol. 669. P. 012032 (1-10) |
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| Other Authors: | , , , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000625291 Перейти в каталог НБ ТГУ |