Microstructure and properties of nanocomposite Al-Si-N system coatings produced by magnetron sputtering

The paper presents the results of investigations of the structural and phase conditions, mechanical and optical properties of Al-Si-N system coating obtained by magnetron sputtering. The thickness of this coating ranges from 3 to 19 µm and is sprayed on silica glass using magnetron sputtering techni...

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Bibliographic Details

Published in:	AIP Conference Proceedings Vol. 1772. P. 030014-1-030014-8
Other Authors:	Bozhko, Irina A., Pershukova, Anastasiya, Fedorischeva, Marina V, Khristenko, Yury F., Sergeev, Victor P., Rybalko, Evgeniya
Format:	Article
Language:	English
Subjects:	нанокомпозитные покрытия магнетронное распыление механические свойства оптические свойства статьи в журналах
Online Access:	http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000622551 Перейти в каталог НБ ТГУ