Microstructure and properties of nanocomposite Al-Si-N system coatings produced by magnetron sputtering
The paper presents the results of investigations of the structural and phase conditions, mechanical and optical properties of Al-Si-N system coating obtained by magnetron sputtering. The thickness of this coating ranges from 3 to 19 µm and is sprayed on silica glass using magnetron sputtering techni...
| Published in: | AIP Conference Proceedings Vol. 1772. P. 030014-1-030014-8 |
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| Other Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000622551 Перейти в каталог НБ ТГУ |