Magnetron sputtering of Si-Al-N nanocomposite coatings on quartz for protection against impacts of high speed microparticles

Nanocomposite transparent coatings on the quartz substrates based on the Si-Al-N system were formed by pulsed magnetron sputtering. The protective properties of the coatings were discovered by means of an impact of the flows of iron particles. The microparticles accelerated up to 5-8 km/s using a tw...

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Bibliographic Details

Published in:	Vacuum Vol. 143. P. 454-457
Other Authors:	Psakhie, Sergey G. 1952-2018, Chubik, Petr S., Cherniavsky, Alexander G., Soloviev, V., Solntsev, V. L., Khristenko, Yury F., Sergeev, Victor P.
Format:	Article
Language:	English
Subjects:	прозрачные нанокомпозитные покрытия магнетронное распыление кварцевые подложки статьи в журналах
Online Access:	http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000644733 Перейти в каталог НБ ТГУ