Optical properties of TiO2 films deposited by reactive electron beam sputtering

Titanium dioxide (anatase, a-TiO2) films have been prepared by electron beam sputtering of a TiO2 target in reactive atmosphere and their structural, microstructural, and optical properties were evaluated by reflection high- energy electron diffraction (RHEED) and x-ray diffraction (XRD) analyses, a...

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Bibliographic Details

Published in:	Journal of electronic materials Vol. 46, № 10. P. 6089-6095
Other Authors:	Perevalov, T. V., Atuchin, Victor V., Gritsenko, V. A., Komonov, A. I., Korolkov, Ilya V., Pokrovsky, Lev D., Cheng Wei Shih, Chin, Albert, Kruchinin, Vladimir N.
Format:	Article
Language:	English
Subjects:	пленки диоксида титана оптические свойства электронно-лучевое напыление спетроскопическая эллипсометрия статьи в журналах
Online Access:	http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000644783 Перейти в каталог НБ ТГУ