Properties of gallium oxide films obtained by HF-magnetron sputtering
The results of an analysis of structure and phase composition of gallium oxide films obtained by HF-magnetron sputtering are presented. It is shown that in the interval 290-350 K, the increase in the film conductivity with increasing temperature is due to the excitation of electrons from a local lev...
| Published in: | Russian physics journal Vol. 60, № 11. P. 1911-1916 |
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| Other Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000651715 Перейти в каталог НБ ТГУ |
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| 008 | 190402|2018 ru s a eng dd | ||
| 024 | 7 | |a 10.1007/s11182-018-1302-0 |2 doi | |
| 035 | |a to000651715 | ||
| 039 | 9 | |a 201904031717 |c 201904031717 |d cat34 |c 201904021551 |d VLOAD |y 201904021538 |z Александр Эльверович Гилязов | |
| 040 | |a RU-ToGU |b rus |c RU-ToGU | ||
| 245 | 1 | 0 | |a Properties of gallium oxide films obtained by HF-magnetron sputtering |c T. Z. Lygdenova, V. M. Kalygina, V. A. Novikov [et al.] |
| 504 | |a Библиогр.: 4 назв. | ||
| 520 | 3 | |a The results of an analysis of structure and phase composition of gallium oxide films obtained by HF-magnetron sputtering are presented. It is shown that in the interval 290-350 K, the increase in the film conductivity with increasing temperature is due to the excitation of electrons from a local level Е t located 0.95 eV below the conduction band bottom. | |
| 653 | |a фазовый состав | ||
| 653 | |a вольт-амперная характеристика | ||
| 653 | |a пленки оксида галлия | ||
| 653 | |a магнетронное распыление | ||
| 655 | 4 | |a статьи в журналах |9 879358 | |
| 700 | 1 | |a Kalygina, Vera M. |9 90194 | |
| 700 | 1 | |a Novikov, Vadim A. |9 96879 | |
| 700 | 1 | |a Prudaev, Ilya A. |9 99979 | |
| 700 | 1 | |a Tolbanov, Oleg P. |9 95834 | |
| 700 | 1 | |a Tyazhev, Anton V. |9 95833 | |
| 700 | 1 | |a Lygdenova, T. Z. |9 492219 | |
| 773 | 0 | |t Russian physics journal |d 2018 |g Vol. 60, № 11. P. 1911-1916 |x 1064-8887 | |
| 852 | 4 | |a RU-ToGU | |
| 856 | 4 | |u http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000651715 | |
| 856 | |y Перейти в каталог НБ ТГУ |u https://koha.lib.tsu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=449985 | ||
| 908 | |a статья | ||
| 999 | |c 449985 |d 449985 | ||