Plasma-assisted deposition of dielectric conformal coating using hexamethyldisiloxane as precursor
Plasma polymerization is a rapidly growing field of plasma technology. Using this method, it is possible to solve applied problems, for example, the deposition of conformal dielectric coatings to protect electrical circuit boards operating in outer space. In this paper, we study the vapor deposition...
| Published in: | 2020 7th International Congress on energy fluxes and radiation effects (EFRE 2020), Tomsk, Russia, September 14 - 26, 2020 : proceedings P. 1132-1135 |
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| Other Authors: | , , , , |
| Format: | Book Chapter |
| Language: | English |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:000563941 Перейти в каталог НБ ТГУ |