Effect of oxygen on the electrical conductivity of Pt-contacted α-Ga2O2/ε(κ)-Ga2O3 MSM structures on patterned sapphire substrates

Effect of oxygen on the electrical conductivity of Pt-contacted α-Ga2O2/ε(κ)-Ga2O3 MSM structures on patterned sapphire substrates

Electrical conductivity and gas sensitivity of α-Ga2O2/ ε(κ)-Ga2O3 structures were measured for oxygen concentrations ranging from 2 % to 100 % and temperatures ranging from 25 °C to 220 °C. It was found that the oxygen sensitivity of the structures depended on the donor dopant concentration. The al...

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Bibliographic Details
Published in:IEEE sensors journal Vol. 21, № 13. P. 14636-14644
Other Authors: Yakovlev, Nikita N., Nikolaev, Vladimir I., Stepanov, Sergey I., Almaev, Aleksei V., Pechnikov, Aleksei I., Chernikov, Evgeniy V., Kushnarev, Bogdan O.
Format: Article
Language:English
Subjects:
хемосорбция
электропроводность
кислород
статьи в журналах
Online Access:http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:000892742
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