Effect of oxygen on the electrical conductivity of Pt-contacted α-Ga2O2/ε(κ)-Ga2O3 MSM structures on patterned sapphire substrates
Electrical conductivity and gas sensitivity of α-Ga2O2/ ε(κ)-Ga2O3 structures were measured for oxygen concentrations ranging from 2 % to 100 % and temperatures ranging from 25 °C to 220 °C. It was found that the oxygen sensitivity of the structures depended on the donor dopant concentration. The al...
| Published in: | IEEE sensors journal Vol. 21, № 13. P. 14636-14644 |
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| Other Authors: | , , , , , , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:000892742 Перейти в каталог НБ ТГУ |
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| 024 | 7 | |a 10.1109/JSEN.2021.3072664 |2 doi | |
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| 245 | 1 | 0 | |a Effect of oxygen on the electrical conductivity of Pt-contacted α-Ga2O2/ε(κ)-Ga2O3 MSM structures on patterned sapphire substrates |c N. N. Yakovlev, V. I. Nikolaev, S. I. Stepanov [et al.] |
| 336 | |a Текст | ||
| 337 | |a электронный | ||
| 504 | |a Библиогр.: 42 назв. | ||
| 520 | 3 | |a Electrical conductivity and gas sensitivity of α-Ga2O2/ ε(κ)-Ga2O3 structures were measured for oxygen concentrations ranging from 2 % to 100 % and temperatures ranging from 25 °C to 220 °C. It was found that the oxygen sensitivity of the structures depended on the donor dopant concentration. The alpha -Ga _{2}O_{3}/arepsilon ( kappa )-Ga 2 O 3 structures doped with sim 1.5 imes 10^{17} cm −3 of Sn showed high sensitivity to O 2 in the temperature range from 180 °C to 220 °C and at the bias voltage below 7.5 V. This effect can be attributed to the chemisorption of oxygen molecules on the surface of structures, which reduces energy barriers between ε(κ)-Ga2O3 grains. | |
| 653 | |a хемосорбция | ||
| 653 | |a электропроводность | ||
| 653 | |a кислород | ||
| 655 | 4 | |a статьи в журналах |9 879358 | |
| 700 | 1 | |a Yakovlev, Nikita N. |9 802458 | |
| 700 | 1 | |a Nikolaev, Vladimir I. |9 802460 | |
| 700 | 1 | |a Stepanov, Sergey I. |9 802461 | |
| 700 | 1 | |a Almaev, Aleksei V. |9 407941 | |
| 700 | 1 | |a Pechnikov, Aleksei I. |9 802462 | |
| 700 | 1 | |a Chernikov, Evgeniy V. |9 368195 | |
| 700 | 1 | |a Kushnarev, Bogdan O. |9 802463 | |
| 773 | 0 | |t IEEE sensors journal |d 2021 |g Vol. 21, № 13. P. 14636-14644 |x 1530-437X | |
| 852 | 4 | |a RU-ToGU | |
| 856 | 4 | |u http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:000892742 | |
| 856 | |y Перейти в каталог НБ ТГУ |u https://koha.lib.tsu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=892742 | ||
| 908 | |a статья | ||
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