HVPE growth of corundum-structured α-Ga2O3 on sapphire substrates with α-Cr2O3 buffer layer
Gallium oxide films were grown by HVPE on (0001) sapphire substrates with and without α-Cr2O3 buffer produced by RF magnetron sputtering. Deposition on bare sapphire substrates resulted in a mixture of α-Ga2O3 and ε-Ga2O3 phases with a dislocation density of about 2∙1010 cm-2. The insertion of α-Cr2...
| Published in: | Materials physics and mechanics Vol. 47, № 4. P. 577-581 |
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| Other Authors: | , , , , , , , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:000894602 Перейти в каталог НБ ТГУ |
| LEADER | 02046nab a2200397 c 4500 | ||
|---|---|---|---|
| 001 | koha000894602 | ||
| 005 | 20230320001755.0 | ||
| 007 | cr | | ||
| 008 | 220520|2021 ru s a eng d | ||
| 024 | 7 | |a 10.18149/MPM.4742021_4 |2 doi | |
| 035 | |a koha000894602 | ||
| 040 | |a RU-ToGU |b rus |c RU-ToGU | ||
| 245 | 1 | 0 | |a HVPE growth of corundum-structured α-Ga2O3 on sapphire substrates with α-Cr2O3 buffer layer |c S. I. Stepanov, V. I. Nikolaev, A. V. Almaev [et al.] |
| 336 | |a Текст | ||
| 337 | |a электронный | ||
| 504 | |a Библиогр.: 17 назв. | ||
| 520 | 3 | |a Gallium oxide films were grown by HVPE on (0001) sapphire substrates with and without α-Cr2O3 buffer produced by RF magnetron sputtering. Deposition on bare sapphire substrates resulted in a mixture of α-Ga2O3 and ε-Ga2O3 phases with a dislocation density of about 2∙1010 cm-2. The insertion of α-Cr2O3 buffer layers resulted in phase-pure α-Ga2O3 films and a fourfold reduction of the dislocation density to 5∙109 cm-2. | |
| 653 | |a пленки оксида галлия | ||
| 653 | |a сапфировые подложки | ||
| 653 | |a метод высокочастотного магнетронного распыления | ||
| 655 | 4 | |a статьи в журналах |9 879358 | |
| 700 | 1 | |a Stepanov, Sergey I. |9 802461 | |
| 700 | 1 | |a Nikolaev, Vladimir I. |9 802460 | |
| 700 | 1 | |a Almaev, Aleksei V. |9 407941 | |
| 700 | 1 | |a Pechnikov, Aleksei I. |9 802462 | |
| 700 | 1 | |a Scheglov, Mikhail P. |9 811517 | |
| 700 | 1 | |a Chikiryaka, Andrei V. |9 878330 | |
| 700 | 1 | |a Kushnarev, Bogdan O. |9 802463 | |
| 700 | 1 | |a Polyakov, A. Y. |9 762031 | |
| 773 | 0 | |t Materials physics and mechanics |d 2021 |g Vol. 47, № 4. P. 577-581 |x 1605-2730 |w 0108-60660 | |
| 852 | 4 | |a RU-ToGU | |
| 856 | 4 | |u http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:000894602 | |
| 856 | |y Перейти в каталог НБ ТГУ |u https://koha.lib.tsu.ru/cgi-bin/koha/opac-detail.pl?biblionumber=894602 | ||
| 908 | |a статья | ||
| 999 | |c 894602 |d 894602 | ||
| 039 | |||