Structural, electrical and gas-sensitive properties of Cr2O3 thin films

Cr2O3 thin films were synthesized by RF magnetron sputtering of a Cr target in an oxygen-argon plasma. The effect of annealing temperature on the structural, electrical, and gas-sensitive properties of the Cr2O3 thin films was studied. According to AFM, SEM, XRD, EDX, XPS, optical spectroscopy and e...

Full description

Bibliographic Details

Published in:	Superlattices and microstructures Vol. 151. P. 106835 (1-12)
Other Authors:	Almaev, Aleksei V., Kushnarev, Bogdan O., Chernikov, Evgeniy V., Novikov, Vadim A., Korusenko, Petr M., Nesov, Sergey N.
Format:	Article
Language:	English
Subjects:	оксиды хрома тонкие пленки магнетронное напыление статьи в журналах
Online Access:	http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:000925388 Перейти в каталог НБ ТГУ