Impact on the subsurface layers of the single-crystal β-Ga2O3 wafers induced by a mechanical wear
The tribological experiment applied to the gallium oxide wafer led to changes in its structure which can reduce the single crystal perfection. The effect of mechanical wear on the subsurface layers of the β-Ga2O3 single crystal wafers applied to the plane is studied. A decrease in crystallinity with...
| Опубликовано в: : | Materials science in semiconductor processing Vol. 143. P. 106520 (1-6) |
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| Другие авторы: | , , , , , , |
| Формат: | Статья в журнале |
| Язык: | English |
| Предметы: | |
| Online-ссылка: | http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:000997190 Перейти в каталог НБ ТГУ |