Atomic layer deposition of artificially structured dielectric materials Dissertation for the degree of Doctor of Philosophy in physics
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| Format: | Book |
| Language: | English |
| Published: |
Tartu
Tartu University Press
1999
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| Series: | Dissertationes physicae Universitatis Tartuensis
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| Subjects: | |
| Online Access: | Перейти в каталог НБ ТГУ |
Internet
Перейти в каталог НБ ТГУНаучная библиотека ТГУ: Книгохранилище
| Call Number: |
1-857330к 537 |
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| Available Place a Hold |