Low-resistivity gas sensors based on the In2O3-Ga2O3 mixed compounds films
The effect of H2, NH3, CO, CH4, O2 and NO2 on the electroconductive properties of the In2O3-Ga2O3 mixed compounds films obtained by the halide vapor phase epitaxy was studied. In the temperature range of 150-550 °C In2O3-Ga2O3 films are characterized by high responses, high speed of operation when e...
| Опубликовано в: : | Materials today communications Vol. 34. P. 105241 (1-10) |
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| Другие авторы: | , , , , , , , , , , , |
| Формат: | Статья в журнале |
| Язык: | English |
| Предметы: | |
| Online-ссылка: | http://vital.lib.tsu.ru/vital/access/manager/Repository/koha:001016315 Перейти в каталог НБ ТГУ |
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| 245 | 1 | 0 | |a Low-resistivity gas sensors based on the In2O3-Ga2O3 mixed compounds films |c N. N. Yakovlev, A. V. Almaev, V. I. Nikolaev [et al.] |
| 336 | |a Текст | ||
| 337 | |a электронный | ||
| 504 | |a Библиогр.: 78 назв. | ||
| 520 | 3 | |a The effect of H2, NH3, CO, CH4, O2 and NO2 on the electroconductive properties of the In2O3-Ga2O3 mixed compounds films obtained by the halide vapor phase epitaxy was studied. In the temperature range of 150-550 °C In2O3-Ga2O3 films are characterized by high responses, high speed of operation when exposed to H2, NH3, CO and O2. A qualitative mechanism of gas sensitivity for the In2O3-Ga2O3 mixed compounds films to gases was proposed. The gas-sensitive characteristics of In2O3, κ(ε)-Ga2O3 and In2O3-Ga2O3 films were compared. The advantage of the In2O3-Ga2O3 mixed compounds films compared with Ga2O3 and In2O3 films is a low base electrical resistivity with a relatively high gas sensitivity. | |
| 653 | |a газовые сенсоры | ||
| 653 | |a электрические свойства | ||
| 653 | |a низкое сопротивление | ||
| 653 | |a оксиды металлов | ||
| 653 | |a пленки | ||
| 655 | 4 | |a статьи в журналах |9 917080 | |
| 700 | 1 | |a Yakovlev, Nikita N. |9 802458 | |
| 700 | 1 | |a Almaev, Aleksei V. |9 407941 | |
| 700 | 1 | |a Nikolaev, Vladimir I. |9 802460 | |
| 700 | 1 | |a Kushnarev, Bogdan O. |9 802463 | |
| 700 | 1 | |a Pechnikov, Aleksei I. |9 802462 | |
| 700 | 1 | |a Stepanov, Sergey I. |9 802461 | |
| 700 | 1 | |a Chikiryaka, Andrei V. |9 878330 | |
| 700 | 1 | |a Timashov, R. B. |9 877229 | |
| 700 | 1 | |a Scheglov, Mikhail P. |9 811517 | |
| 700 | 1 | |a Butenko, Pavel N. |9 876423 | |
| 700 | 1 | |a Almaev, Dmitry A. |9 962003 | |
| 700 | 1 | |a Chernikov, Evgeniy V. |9 368195 | |
| 773 | 0 | |t Materials today communications |d 2023 |g Vol. 34. P. 105241 (1-10) |x 2352-4928 | |
| 852 | 4 | |a RU-ToGU | |
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