Gas−sensing properties of In2O3−Ga2O3 alloy films
The effect of the gaseous medium composition on the electrically conductive properties of In2O3−Ga2O3 films obtained by halide vapor phase epitaxy has been studied. In the temperature range of 100−550◦C, the In2O3−Ga2O3 films exhibit high sensitivity to H2, NH3 and possess hyphen performance and low...
| Опубликовано в: : | Technical physics letters Vol. 48, № 7. P. 76-79 |
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| Другие авторы: | , , , , , , , , , |
| Формат: | Статья в журнале |
| Язык: | English |
| Предметы: | |
| Online-ссылка: | https://vital.lib.tsu.ru/vital/access/manager/Repository/koha:001157044 Перейти в каталог НБ ТГУ |
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| 245 | 1 | 0 | |a Gas−sensing properties of In2O3−Ga2O3 alloy films |c V. I. Nikolaev, A. V. Almaev, B. O. Kushnarev [et al.] |
| 336 | |a Текст | ||
| 337 | |a электронный | ||
| 504 | |a Библиогр.: 25 назв. | ||
| 520 | 3 | |a The effect of the gaseous medium composition on the electrically conductive properties of In2O3−Ga2O3 films obtained by halide vapor phase epitaxy has been studied. In the temperature range of 100−550◦C, the In2O3−Ga2O3 films exhibit high sensitivity to H2, NH3 and possess hyphen performance and low base resistance. A qualitative mechanism for the sensitivity of In2O3−Ga2O3 films to gases is proposed. | |
| 653 | |a парофазная эпитаксия | ||
| 653 | |a газовая чувствительность | ||
| 655 | 4 | |a статьи в журналах | |
| 700 | 1 | |a Nikolaev, Vladimir I. |9 802460 | |
| 700 | 1 | |a Almaev, Aleksei V. |9 407941 | |
| 700 | 1 | |a Kushnarev, Bogdan O. |9 802463 | |
| 700 | 1 | |a Pechnikov, Aleksei I. |9 802462 | |
| 700 | 1 | |a Stepanov, Sergey I. |9 802461 | |
| 700 | 1 | |a Chikiryaka, Andrei V. |9 878330 | |
| 700 | 1 | |a Timashov, R. B. |9 877229 | |
| 700 | 1 | |a Scheglov, Mikhail P. |9 811517 | |
| 700 | 1 | |a Butenko, Pavel N. |9 876423 | |
| 700 | 1 | |a Chernikov, Evgeniy V. |9 368195 | |
| 773 | 0 | |t Technical physics letters |d 2022 |g Vol. 48, № 7. P. 76-79 |x 1063-7850 | |
| 852 | 4 | |a RU-ToGU | |
| 856 | 4 | |u https://vital.lib.tsu.ru/vital/access/manager/Repository/koha:001157044 | |
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