Electrical characteristics of epitaxial MCT after As+ implantation

In this work we studied the characteristics of MBE MCT films after the introduction of different energies As+ with different doses of irradiation. Some of the samples were subjected to post-implantation annealing. Electrical characteristics of the samples were determined from Hall measurements. Volt...

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Bibliographic Details

Published in:	Journal of Physics: Conference Series Vol. 830. P. 012083 (1-6)
Other Authors:	Voytsekhovskiy, Alexander V., Korotaev, Alexander G., Lyapunov, D. V., Dvoretsky, Sergei A., Smirnov, P., Izhnin, Igor I.
Format:	Article
Language:	English
Subjects:	эпитаксиальные пленки ионная имплантация приповерхностные слои статьи в журналах
Online Access:	http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000583442 Перейти в каталог НБ ТГУ