Some properties of near-surface layer of graded-gap MBE HgCdTe after boron ion implantation
The effect of ion implantation of boron ions with an energy of 100 keV and a dose of (1-6)×1015 cm-2 in the MBE HgCdTe films on the characteristics of the MIS structures based on these films was investigated. The changes of the conductivity type in the near-surface layer of HgCdTe after ion implanta...
| Published in: | Journal of Physics: Conference Series Vol. 830. P. 012081 (1-4) |
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| Other Authors: | , , , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Online Access: | http://vital.lib.tsu.ru/vital/access/manager/Repository/vtls:000583441 Перейти в каталог НБ ТГУ |
| Summary: | The effect of ion implantation of boron ions with an energy of 100 keV and a dose of (1-6)×1015 cm-2 in the MBE HgCdTe films on the characteristics of the MIS structures based on these films was investigated. The changes of the conductivity type in the near-surface layer of HgCdTe after ion implantation of boron and etching by ions of argon were detected. The concentrations of the major charge carriers in the near-surface layer of the epitaxial films after ion implantation and after ion etching were close to 5.88×1016 cm-3 and 2.47×1017 cm-3, respectively. |
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| Bibliography: | Библиогр.: 4 назв. |
| ISSN: | 1742-6588 |